DocumentCode
2767416
Title
Parylene-C as a piezoelectric material
Author
Kim, Justin Young-Hyun ; Cheng, Austin ; Tai, Yu-Chong
Author_Institution
California Inst. of Technol., Pasadena, CA, USA
fYear
2011
fDate
23-27 Jan. 2011
Firstpage
473
Lastpage
476
Abstract
This work reports the first study of preparing Parylene-C (i.e., PA-C) as a piezoelectric material. The poling of the Parylene-C film was performed with an electric field up to 40 MV/m up to 250°C. This work also applied a charge integration method to measure the longitudinal piezoelectric coefficient (i.e., d33) using step-wise pneumatic pressure changes over the piezoelectric PA-C film samples in a sealed chamber. The (d33) is measured to be -0.01 to -2.00pC/N depending on poling conditions.
Keywords
dielectric polarisation; piezoelectric materials; polymer films; Parylene-C film; charge integration method; longitudinal piezoelectric coefficient; piezoelectric material; poling; step-wise pneumatic pressure changes; temperature 250 degC; Films; Fluctuations; Piezoelectric materials; Polymers; Solenoids; Temperature distribution; Valves;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location
Cancun
ISSN
1084-6999
Print_ISBN
978-1-4244-9632-7
Type
conf
DOI
10.1109/MEMSYS.2011.5734464
Filename
5734464
Link To Document