DocumentCode
2767576
Title
3D airflow velocity vector sensor
Author
Nguyen Minh-Dung ; Takahashi, Hiroki ; Kuwana, Katsuyuki ; Takahata, Tomoyuki ; Matsumoto, Kaname ; Shimoyama, Isao
Author_Institution
Univ. of Tokyo, Tokyo, Japan
fYear
2011
fDate
23-27 Jan. 2011
Firstpage
513
Lastpage
516
Abstract
In this paper, we propose a sensor for measuring the three-dimensional (3D) velocity vector of airflows. The sensor, which was a 10 mm spherical figure, had a laminated structure with three channels fabricated inside. The components of the airflow velocity vector were measured respectively by three piezo-resistive cantilevers fabricated in each of the three channels. Experiments with a wind tunnel demonstrated that our sensor can measure not only the velocity amplitude but the 3D velocity direction as well.
Keywords
air; cantilevers; channel flow; flow sensors; piezoresistive devices; velocity measurement; wind tunnels; 3D airflow velocity vector sensor; 3D velocity direction; laminated structure; piezo-resistive cantilevers; three-dimensional velocity vector; velocity amplitude; wind tunnel; Atmospheric modeling; Fabrication; Gold; Silicon; Three dimensional displays; Velocity measurement; Wind speed;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location
Cancun
ISSN
1084-6999
Print_ISBN
978-1-4244-9632-7
Type
conf
DOI
10.1109/MEMSYS.2011.5734474
Filename
5734474
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