4.8 MHz AFM nanoprobes with capacitive transducers and batch-fabricated nanotips

Author

Walter, B. ; Faucher, M. ; Mairiaux, E. ; Xiong, Z. ; Buchaillot, L. ; Legrand, B.

Author_Institution

Inst. d´´Electron., de Microelectron. et de Nanotechnol., CNRS, Villeneuve d´´Ascq, France

fYear

2011

fDate

23-27 Jan. 2011

Firstpage

517

Lastpage

520

Abstract

We report here on high resonance frequency AFM probes based on MEMS bulk mode resonators. They consist on silicon ring resonators with capacitive transducers vibrating in the in-plane elliptic mode. Nano-tips placed at the maximum of vibration are fabricated in batch process. After electrical and optical characterizations, chips supporting the resonator and the prominent tip are extracted from the wafer. Next, the AFM nanoprobes are integrated in a commercially available AFM set-up with a modified probe holder. Experimental results of high resonance frequency AFM images are presented.

Keywords

atomic force microscopy; capacitive sensors; elemental semiconductors; micromechanical resonators; silicon; AFM images; AFM nanoprobes; MEMS bulk mode resonators; Si; batch-fabricated nanotips; capacitive transducers; elliptic mode; frequency 4.8 MHz; resonance frequency; silicon ring resonators; Electrodes; Frequency measurement; Nanobioscience; Optical resonators; Probes; Resonant frequency; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on

Conference_Location

Cancun

ISSN

1084-6999

Print_ISBN

978-1-4244-9632-7

Type

conf

DOI

10.1109/MEMSYS.2011.5734475

Filename

5734475