A new biaxial silicon resonant micro accelerometer

A new biaxial silicon resonant accelerometer characterized by a high sensitivity and a low cross-axis sensitivity is presented in this paper. The device allows for the simultaneous measure of acceleration acting along two different axes using two couples of resonating slender beams linked to two couples of flexible beams and to a proof mass. The conceptual scheme used for the biaxial resonant accelerometer is similar to the one applied for the uniaxial resonant accelerometer reported in. Experimental results demonstrate a differential sensitivity of 201 Hz/g around a resonance frequency of 84 kHz.