Development of passive surface acoustic wave gyroscope with standing wave mode

Author

Oh, Haekwan ; Yang, Sang Sik ; Lee, Keekeun

Author_Institution

Div. of Electron. Eng., Ajou Univ., Suwon, South Korea

fYear

2011

fDate

23-27 Jan. 2011

Firstpage

565

Lastpage

568

Abstract

We developed a novel surface acoustic wave (SAW) gyroscope based on interference effect. It consists of a two-port SAW resonator (driving part) and a SAW sensor (sensing part) with a single phase unidirectional transducer (SPUDT) and three shorted grating reflectors that make sharp reflection peaks. The SAW induced by the Coriolis force interferes with the SAW generated from the sensor SPUDT in the reflective delay line. Coupling of mode (COM) modeling and simulation analysis were conducted to determine the device parameters. Then, the device was fabricated and measured on a rate table. Within the angular rate range up to 2000 deg/s, the sensitivity obtained is 0.019 ns(deg/s)^-1.

Keywords

Coriolis force; electromagnetic coupling; electromagnetic wave interference; gyroscopes; reflectivity; standing wave meters; surface acoustic wave resonators; surface acoustic wave sensors; surface acoustic wave transducers; COM modeling; COM simulation analysis; Coriolis force; SAW gyroscope; SAW sensor; coupling of mode; device parameter; grating reflector; interference effect; passive surface acoustic wave gyroscope; reflection peak; reflective delay line; single phase unidirectional transducer; standing wave mode; two-port SAW resonator; Delay effects; Fabrication; Force; Gyroscopes; Optical resonators; Sensors; Surface acoustic waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on

Conference_Location

Cancun

ISSN

1084-6999

Print_ISBN

978-1-4244-9632-7

Type

conf

DOI

10.1109/MEMSYS.2011.5734487

Filename

5734487