Title :
Development of passive surface acoustic wave gyroscope with standing wave mode
Author :
Oh, Haekwan ; Yang, Sang Sik ; Lee, Keekeun
Author_Institution :
Div. of Electron. Eng., Ajou Univ., Suwon, South Korea
Abstract :
We developed a novel surface acoustic wave (SAW) gyroscope based on interference effect. It consists of a two-port SAW resonator (driving part) and a SAW sensor (sensing part) with a single phase unidirectional transducer (SPUDT) and three shorted grating reflectors that make sharp reflection peaks. The SAW induced by the Coriolis force interferes with the SAW generated from the sensor SPUDT in the reflective delay line. Coupling of mode (COM) modeling and simulation analysis were conducted to determine the device parameters. Then, the device was fabricated and measured on a rate table. Within the angular rate range up to 2000 deg/s, the sensitivity obtained is 0.019 ns(deg/s)-1.
Keywords :
Coriolis force; electromagnetic coupling; electromagnetic wave interference; gyroscopes; reflectivity; standing wave meters; surface acoustic wave resonators; surface acoustic wave sensors; surface acoustic wave transducers; COM modeling; COM simulation analysis; Coriolis force; SAW gyroscope; SAW sensor; coupling of mode; device parameter; grating reflector; interference effect; passive surface acoustic wave gyroscope; reflection peak; reflective delay line; single phase unidirectional transducer; standing wave mode; two-port SAW resonator; Delay effects; Fabrication; Force; Gyroscopes; Optical resonators; Sensors; Surface acoustic waves;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-9632-7
DOI :
10.1109/MEMSYS.2011.5734487
