Title :
In-situ XRD investigation on phase transition of CdTe thin films during a CdCl2 heat treatment
Author :
Kim, MaengJun ; Lee, SungHo ; Sohn, SangHo
Author_Institution :
Dept. of Phys., KyungPook Nat. Univ., Daegu, South Korea
Abstract :
In order to investigate the effect of CdCl2 heat treatment on the physical properties of the CdTe thin films grown by a sputtering method, the CdTe thin films were coated with CdCl2. The recrystallisation, grain growth and randomization were investigated by monitoring the phase transition of CdCl2 heat treated CdTe specimens during temperature ramp annealed using in situ high-temperature X-ray diffraction. The result shows that the recrystallisation of the CdTe(111) texture and other textures does not occur simultaneously but sequencially. The XRD data shows there was no overlapped temperature region for recrystallisation between (111) and other textures.
Keywords :
II-VI semiconductors; X-ray diffraction; annealing; cadmium compounds; grain growth; recrystallisation; semiconductor thin films; solid-state phase transformations; sputter deposition; CdCl2; CdTe; grain growth; heat treatment; in-situ XRD investigation; phase transition; physical properties; recrystallisation; sputtering method; temperature ramp annealing; thin films;
Conference_Titel :
Photovoltaic Specialists Conference (PVSC), 2010 35th IEEE
Conference_Location :
Honolulu, HI
Print_ISBN :
978-1-4244-5890-5
DOI :
10.1109/PVSC.2010.5616175