Optimal T-support anchoring for bar-type BAW resonators

Author

Jansen, R. ; Stoffels, S. ; Rottenberg, X. ; Zhang, Y. ; De Coster, J. ; Donnay, S. ; Severi, S. ; Borremans, J. ; Lofrano, M. ; Van der Plas, G. ; Verheyen, P. ; De Raedt, W. ; Tilmans, H.A.C.

Author_Institution

Imec, Leuven, Belgium

fYear

2011

fDate

23-27 Jan. 2011

Firstpage

609

Lastpage

612

Abstract

This paper reports on an optimal support anchoring for bar-type BAW resonators. We demonstrate both theoretically and experimentally the implementation of long (in terms of acoustic wavelength) T-supports without compromising neither on the Q-factor nor on the electromechanical (pull-in) stability of the resonator. Compared to the more common straight supports, these long T-supports provide rigidity for displacements in one direction combined with low stiffness in the other two directions, thus offering more freedom in the structural design, as well as potential for thermal “manipulation”, e.g., insulation.

Keywords

Q-factor; acoustic resonators; bulk acoustic wave devices; Q-factor; acoustic wavelength; bar-type BAW resonator; electromechanical pull-in stability; optimal T-support anchoring; structural design; thermal manipulation; Acoustic beams; Acoustics; Electrodes; Flexible printed circuits; Impedance; Micromechanical devices; Resonant frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on

Conference_Location

Cancun

ISSN

1084-6999

Print_ISBN

978-1-4244-9632-7

Type

conf

DOI

10.1109/MEMSYS.2011.5734498

Filename

5734498