Title :
Towards high-resolution flow cameras made of artificial hair flow-sensors for flow pattern recognition
Author :
Dagamseh, A.M.K. ; Lammerink, T.S.J. ; Sanders, R. ; Wiegerink, R.J. ; Krijnen, G.J.M.
Author_Institution :
MESA+ Res. Inst., Univ. of Twente, Enschede, Netherlands
Abstract :
Next to image sensors, future´s robots will definitely use a variety of sensing mechanisms for navigation and prevention of risks to human life, for example flow-sensor arrays for 3D hydrodynamic reconstruction of the near environment. This paper aims to quantify the possibilities of our artificial hair flow-sensor for high-resolution flow field visualization. Using silicon-on-insulator (SOI) technology with deep trench isolation structures, hair-based flow sensors with separate electrodes arranged in wafer-scale arrays have been successfully fabricated. Frequency Division Multiplexing (FDM) is used to interrogate individual hair elements providing simultaneous real-time flow measurements from multiple hairs. This is demonstrated by reconstructing the dipole fields along different array elements and hence localizing a dipole source relative to the hair array elements.
Keywords :
cameras; flow sensors; flow visualisation; pattern recognition; wafer-scale integration; artificial hair flow-sensors; deep trench isolation structures; flow field visualization; flow pattern recognition; high-resolution flow cameras; silicon-on-insulator technology; wafer-scale arrays; Array signal processing; Electrodes; Fabrication; Frequency division multiplexing; Hair; Sensor arrays;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-9632-7
DOI :
10.1109/MEMSYS.2011.5734508