Very high stability achievement in MEMS based AC voltage references

This paper presents the high-level of stability of voltage references operated in alternating current (AC) and based on the pull-in effect in split-fingers MEMS architectures. Our work deals with the design and fabrication of new MEMS devices and presents results of both electrical and mechanical characterizations as well as the development of an optimized read-out electronics showing a mature stage of this technology to be rapidly implemented in various applications. The new aspects in this paper are related to the new architecture of the MEMS allowing to minimize the effect of leakage capacitances on the stability of the voltage reference and to avoid to compensate any “built-in voltage” generated at metal-semiconductor interfaces.