DocumentCode
2768474
Title
Piezoactuators for motion control from centimeter to nanometer
Author
Breguet, J.-M. ; Perez, R. ; Bergander, A. ; Schmitt, C. ; Clavel, R. ; Bleuler, H.
Author_Institution
EPFL, Swiss Federal Inst. of Technol., Lausanne, Switzerland
Volume
1
fYear
2000
fDate
2000
Firstpage
492
Abstract
This paper presents several approaches for piezoactuators in motion control over a large dynamic range (cm to nm). The devices include monolithic two-degree-of-freedom actuators with mechanical amplification, stick-slip actuators and 6-DOF designs of micro-positioners. Closed loop feedback is of course necessary for good performance. All the proposed solutions have been realized and experimental results are discussed, application examples in scanning probe microscopy and biology are shortly presented
Keywords
closed loop systems; feedback; motion control; piezoelectric actuators; 6-DOF designs; closed loop feedback; mechanical amplification; micro-positioners; monolithic 2-DOF actuators; motion control; piezoactuators; stick-slip actuators; Actuators; Arm; Costs; Dynamic range; Flexible structures; Motion control; Nanobioscience; Piezoelectric materials; Scanning probe microscopy; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Intelligent Robots and Systems, 2000. (IROS 2000). Proceedings. 2000 IEEE/RSJ International Conference on
Conference_Location
Takamatsu
Print_ISBN
0-7803-6348-5
Type
conf
DOI
10.1109/IROS.2000.894652
Filename
894652
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