Broadband tunable 3D metamaterials at terahertz frequencies

In this paper, we present novel optically tunable 3D metamaterials operating at terahertz (THz) frequencies which exhibit a tuning range of approximate 50% of the resonance frequencies. The 3D array structures, consisting of double splits ring resonators (DSRRs) with silicon pads on sapphire, were fabricated using multilayer electroplating technology (MET). As a function of incident laser power, a red-shift in the resonant frequency from 1.74 THz to 1.16 THz was experimentally achieved. Our optically tunable device has potential applications as a terahertz modulator or switch that complements previous approaches.