DocumentCode
2768495
Title
Fabrication and characterization of silicon micro mirror with CNT hinge
Author
Tung, B.T. ; Dau, V.T. ; Dao, D.V. ; Yamada, T. ; Hata, K. ; Sugiyama, S.
Author_Institution
Ritsumeikan Univ., Kusatsu, Japan
fYear
2011
fDate
23-27 Jan. 2011
Firstpage
688
Lastpage
691
Abstract
This paper reports the fabrication and characterization results of a silicon micro mirror fabricated by integrated of top-down fabrication of CNTs thin film and conventional micromachining. The silicon mirror is suspended by CNT hinge and actuated by using electrostatic force through angular vertical comb system. The performance of the mirror had been characterized. Thanks to the excellent mechanical properties of CNTs, the mirror could be driven by low voltage, i.e. less than 5 V, and response frequency up to 500 Hz.
Keywords
carbon nanotubes; elemental semiconductors; micro-optomechanical devices; micromachining; micromirrors; nanophotonics; optical fabrication; silicon; C; CNT hinge; CNT thin film; Si; angular vertical comb system; electrostatic force; micromachining; micromirror fabrication; top-down fabrication; Carbon nanotubes; Fasteners; Films; Fingers; Micromechanical devices; Mirrors; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location
Cancun
ISSN
1084-6999
Print_ISBN
978-1-4244-9632-7
Type
conf
DOI
10.1109/MEMSYS.2011.5734518
Filename
5734518
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