Miniature wishbone interferometer using rotary comb drive actuator for environment gas monitoring

Miniature interferometer with a maximum resolution of approximately 2 cm^-1 which consists of the rotary comb drive actuator, three-dimensional corner cube mirrors, beam splitter and capacitive displacement sensor. The total size of the interferometer is approximately 8 × 8 mm². The displacement of the corner cube mirror has approximately 650 μm when a voltage of 180 V is applied and this displacement observed using capacitive displacement sensor. Hereby, the maximum optical path difference of approximately 2640 μm is achieved. The interferogram of the superluminescent diode light source is successfully detected and its wavenumber of approximately 12000 cm^-1 is indentified.