DocumentCode
2768646
Title
Tunable all-silicone multi-chamber achromatic microlens
Author
Waibel, Philipp ; Mader, Daniel ; Liebetraut, Peter ; Zappe, Hans ; Seifert, Andreas
Author_Institution
Dept. of Microsyst. Eng., Univ. of Freiburg, Freiburg, Germany
fYear
2011
fDate
23-27 Jan. 2011
Firstpage
728
Lastpage
731
Abstract
We present an all-silicone, multi-chamber fluidic microlens system designed for achromatic focal length tunability in a given wavelength range. This micro-optical system is composed of an integrated stack of multiple microlenses, all fabricated by a simple silicone molding technique. Focal-length tuning of the multi-chamber lenses is realized by external pressure actuation, although the design allows integration of the micropump developed separately for this family of tunable fluidic lenses. A focal length tuning range of -40 mm to -5 mm and 5 mm to 40 mm was determined, and measurements of chromatic aberration were shown at two discrete focal lengths, 12 mm and 15 mm.
Keywords
aberrations; integrated optics; microlenses; optical design techniques; optical pumping; optical tuning; silicones; achromatic focal length tunability; all-silicone; chromatic aberration; integrated stack; microoptical system; micropump; multichamber achromatic microlens; multichamber fluidic microlens; simple silicone molding; Apertures; Biomembranes; Length measurement; Lenses; Liquids; Microoptics; Pressure measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location
Cancun
ISSN
1084-6999
Print_ISBN
978-1-4244-9632-7
Type
conf
DOI
10.1109/MEMSYS.2011.5734528
Filename
5734528
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