• DocumentCode
    2768646
  • Title

    Tunable all-silicone multi-chamber achromatic microlens

  • Author

    Waibel, Philipp ; Mader, Daniel ; Liebetraut, Peter ; Zappe, Hans ; Seifert, Andreas

  • Author_Institution
    Dept. of Microsyst. Eng., Univ. of Freiburg, Freiburg, Germany
  • fYear
    2011
  • fDate
    23-27 Jan. 2011
  • Firstpage
    728
  • Lastpage
    731
  • Abstract
    We present an all-silicone, multi-chamber fluidic microlens system designed for achromatic focal length tunability in a given wavelength range. This micro-optical system is composed of an integrated stack of multiple microlenses, all fabricated by a simple silicone molding technique. Focal-length tuning of the multi-chamber lenses is realized by external pressure actuation, although the design allows integration of the micropump developed separately for this family of tunable fluidic lenses. A focal length tuning range of -40 mm to -5 mm and 5 mm to 40 mm was determined, and measurements of chromatic aberration were shown at two discrete focal lengths, 12 mm and 15 mm.
  • Keywords
    aberrations; integrated optics; microlenses; optical design techniques; optical pumping; optical tuning; silicones; achromatic focal length tunability; all-silicone; chromatic aberration; integrated stack; microoptical system; micropump; multichamber achromatic microlens; multichamber fluidic microlens; simple silicone molding; Apertures; Biomembranes; Length measurement; Lenses; Liquids; Microoptics; Pressure measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
  • Conference_Location
    Cancun
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4244-9632-7
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2011.5734528
  • Filename
    5734528