Title :
Ultra-compact micromirror with polymeric hard magnet for use in endoscopic imaging
Author :
Weber, N. ; Hertkorn, D. ; Zappe, H. ; Seifert, A.
Author_Institution :
Dept. of Microsyst. Eng., Univ. of Freiburg, Freiburg, Germany
Abstract :
An ultra-compact magnetically actuated micromirror with a polymeric hard magnetic layer on its back-side is developed for use in an endoscopic probe. This novel construction yields high deflection angles at extremely low magnetic fields which can be generated by a separate actuation coil. As no direct electrical connection is required for operating the micromirror, it can be mounted on a rotating platform and used for tubular scanning of the interior of body passageways or blood vessels.
Keywords :
bioMEMS; biomedical equipment; biomedical optical imaging; blood vessels; electromagnetic actuators; endoscopes; microfabrication; micromirrors; permanent magnets; polymers; actuation coil; blood vessels; body passageways; construction yields; deflection angles; electrical connection; endoscopic imaging; magnetic actuation; polymeric hard magnet; tubular scanning; ultracompact micromirror; Magnetic devices; Magnetic resonance; Magnetic separation; Magnetomechanical effects; Micromirrors; Polymers;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-9632-7
DOI :
10.1109/MEMSYS.2011.5734529
