50Ω-terminated 900MHz monolithic lateral-extensional piezoelectric filters on ultrananocryslalline diamond

Author

Fatemi, H. ; Harrington, B.P. ; Zeng, H. ; Carlisle, J. ; Abdolvand, R.

Author_Institution

Oklahoma State Univ., Tulsa, OK, USA

fYear

2011

fDate

23-27 Jan. 2011

Firstpage

744

Lastpage

747

Abstract

For the first time, very low insertion loss (3.7 dB) 900 MHz micromachined bulk-lateral mode filters are reported with 50 Ω termination impedance. Two lateral-extensional modes of a single resonant structure are coupled together to enable low insertion loss (IL) while maintaining a very small footprint (~ 2666 μm × 2666 μm). These narrow-band filters are fabricated on a thin-film piezoelectric-on-diamond (TPoD) platform and demonstrate an adjustable fractional bandwidth between ~0.1 to 0.4 percent.

Keywords

UHF filters; crystal filters; diamond; thin film circuits; C; TPoD platform; adjustable fractional bandwidth; frequency 900 MHz; insertion loss; loss 3.7 dB; micromachined bulk-lateral mode filters; monolithic lateral-extensional piezoelectric filters; narrowband filters; resistance 50 ohm; single resonant structure; termination impedance; thin-film piezoelectric-on-diamond platform; ultrananocryslalline diamond; Diamond-like carbon; Films; Frequency measurement; Microwave filters; Resonant frequency; Resonator filters; Temperature measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on

Conference_Location

Cancun

ISSN

1084-6999

Print_ISBN

978-1-4244-9632-7

Type

conf

DOI

10.1109/MEMSYS.2011.5734532

Filename

5734532