Theory and application of non-contact methods for in-line reliability determination

This paper has offered an overview of the present status of state-of-the-art non-contact electrical metrologies offered by Semiconductor Diagnostics Inc. for in-line reliability determination. The fundamental methodologies employed in the techniques to monitor reliability concerns, ranging from heavy metal contamination in silicon to dielectric charges, leakage and capacitance, have been discussed. Lastly, the value of the of the fast-feedback low cost benefits enabled by the non-contact, preparation free approach has been established through a few select application examples.