DocumentCode :
2768846
Title :
Improvement in temperature characteristics of plate wave resonator using rotated Y-cut LiTaO3 / sin structure
Author :
Kando, Hajime ; Watanabe, Munehisa ; Kido, Shunsuke ; Iwamoto, Takashi ; Ito, Korekiyo ; Hayakawa, Norihiro ; Araki, Kiyoto ; Hatsuda, Ippei ; Takano, Takakazu ; Nagao, Yuji ; Nakao, Takeshi ; Toi, Takanori ; Yoshii, Yoshiharu
Author_Institution :
Murata Manuf. Co., Ltd., Nagaokakyo, Japan
fYear :
2011
fDate :
23-27 Jan. 2011
Firstpage :
768
Lastpage :
771
Abstract :
Realization of a high frequency resonator for 3.6 GHz-band filter in the International Mobile Telecommunication Advanced (IMT-Advanced) system is desired. It is difficult to accomplish such a high frequency resonator using conventional surface acoustic wave (SAW) technology, because the strip width of the inter-digital transducers (IDT) becomes too narrow. Although anti-symmetry 1st (A1) mode Lamb type plate wave is known to have a high propagation velocity, however it has a problem such as large temperature coefficient of frequency (TCF). This paper reports an improved technique for TCF in A1 mode Lamb type plate wave resonator with air-gap type membrane by using rotated Y-cut single crystal LiTaO3 thin plate. The fabricated plate wave resonator has excellent characteristics such as a zero TCF, a large electromechanical coupling coefficient (k2) of 7 % and a high acoustic wave velocity of 12,142 m/s.
Keywords :
lithium compounds; microwave filters; silicon compounds; surface acoustic wave resonators; surface acoustic waves; tantalum compounds; thin films; A1 mode Lamb type plate wave resonator; International Mobile Telecommunication Advanced system; LiTaO3-SiN; air-gap type membrane; filter; frequency 3.6 GHz; frequency temperature coefficient; high frequency resonator; Acoustic waves; Biomembranes; Crystals; Films; Resonant frequency; Resonator filters; Silicon compounds;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
ISSN :
1084-6999
Print_ISBN :
978-1-4244-9632-7
Type :
conf
DOI :
10.1109/MEMSYS.2011.5734538
Filename :
5734538
Link To Document :
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