Title :
Small, low-ohmic RF MEMS switches with thin-film package
Author :
Wunnicke, O. ; Kwinten, H. ; van Leuken-Peters, L. ; in ´t Zandt, M. ; Reimann, K. ; Aravindh, V. ; Suy, H.M.R. ; Goossens, M.J. ; Wolters, R.A.M. ; Besling, W.F.A. ; van Beek, J.T.M. ; Steeneken, P.G.
Author_Institution :
NXP-TSMC Res. Center, NXP Semicond., Eindhoven, Netherlands
Abstract :
We report on small, low-ohmic RF MEMS switches with a circular membrane actuator design. A low temperature process is used to manufacture both the MEMS switch as well as its hermetic, thin-film package resulting in a very small footprint device. The hermetic seal of the package significantly increases the switch lifetime and reliability. The switches demonstrate good RF performance and high switching speeds. A comparison with other MEMS switches reveals that these MEMS switches possess a low on-resistance while occupying only a very small area on the wafer.
Keywords :
hermetic seals; microswitches; semiconductor device packaging; semiconductor device reliability; semiconductor thin films; RF performance; circular membrane actuator design; hermetic seal; hermetic thin-film package; high switching speed; low temperature process; low-ohmic RF MEMS switch; switch lifetime; switch reliability; Biomembranes; Contacts; Electrodes; Microswitches; Radio frequency; Reliability;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-9632-7
DOI :
10.1109/MEMSYS.2011.5734544
