Effect of the sputtering parameters on the growth and piezoelectric properties of zinc oxide thin films

Author

Kutepova, V.P. ; Hall, D.A.

Author_Institution

Mater. Sci. Centre, Univ. of Manchester Inst. of Sci. & Technol., UK

Volume

1

fYear

1998

fDate

1998

Firstpage

213

Abstract

In this paper the potential of zinc oxide (ZnO) thin films as a piezoelectric material for surface acoustic wave (SAW) sensor developments is discussed. ZnO thin films were deposited by RF magnetron sputtering onto Al/SiO₂/Si substrate. In highly oriented, transparent films lattice stress could be reduced sufficiently by varying the sputtering pressure and substrate temperature and by the careful selection of the other sputtering parameters. Availability of these structures for SAW device applications has been demonstrated by producing an electrode structure of a one-port resonator. The design and performance of resonators, based on ZnO films is described

Keywords

II-VI semiconductors; piezoelectric semiconductors; piezoelectric thin films; sputter deposition; surface acoustic wave resonators; surface acoustic wave sensors; zinc compounds; Al; Al/SiO₂/Si substrate; RF magnetron sputtering; SAW device applications; SAW sensor; Si; SiO₂; ZnO; ZnO thin films; design; electrode structure; growth; highly oriented transparent films; lattice stress; one-port resonator; performance; piezoelectric properties; sputtering parameters; sputtering pressure; substrate temperature; surface acoustic wave; Acoustic sensors; Acoustic waves; Magnetic sensors; Piezoelectric films; Piezoelectric materials; Semiconductor thin films; Sputtering; Surface acoustic waves; Thin film sensors; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE

Conference_Location

Sendai

ISSN

1051-0117

Print_ISBN

0-7803-4095-7

Type

conf

DOI

10.1109/ULTSYM.1998.762131

Filename

762131