Title :
IDT geometry and crystal cut effects on the frequency-temperature curves of a SAW periodic structure of quartz
Author :
Yong, Yook-Kong ; Kanna, Shigeo
Author_Institution :
Dept. of Civil & Environ. Eng., Rutgers Univ., Piscataway, NJ, USA
Abstract :
Piezoelectric Lagrangian equations for the frequency-temperature behavior of quartz is presented. A finite element study of these Lagrangian equations is performed for a two-dimensional periodic SAW structure of quartz. Plane strain assumptions are used to enable a two-dimensional analysis of straight crested acoustic waves in the structure. Adaptive finite element meshes are employed to reduce the size of the finite element problem. The frequency-temperature characteristics of the two fundamental SAW modes are compared and contrasted. Numerical results are compared with experimental data for the ST- and K-cut of quartz. The finite element results for the turnover temperature and the 2nd temperature coefficient of the f-t curve as a function of the electrode height are found to compare well with the ST-cut experimental data. Similar numerical results for the change in frequency-temperature characteristics of the K-cut as a function of crystal cut angles phi is also found to be compare well with the experimental data. The experimental data are found to follow the lower bandgap frequency SAW1
Keywords :
interdigital transducers; mesh generation; piezoelectric materials; quartz; surface acoustic wave resonators; 2nd temperature coefficient; IDT geometry; SAW periodic structure; SiO2; adaptive finite element meshes; crystal cut effects; electrode height; finite element problem; finite element study; frequency-temperature curves; lower bandgap frequency; piezoelectric Lagrangian equations; plane strain; quartz; straight crested acoustic waves; turnover temperature; two-dimensional analysis; Acoustic waves; Capacitive sensors; Equations; Finite element methods; Frequency; Geometry; Lagrangian functions; Periodic structures; Surface acoustic waves; Temperature;
Conference_Titel :
Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE
Conference_Location :
Sendai
Print_ISBN :
0-7803-4095-7
DOI :
10.1109/ULTSYM.1998.762133