Fabrication and testing of a large area, high density, parylene MEMS µECoG array

Author

Ledochowitsch, P. ; Félus, R.J. ; Gibboni, R.R. ; Miyakawa, A. ; Bao, S. ; Maharbiz, M.M.

Author_Institution

Univ. of California, Berkeley, CA, USA

fYear

2011

fDate

23-27 Jan. 2011

Firstpage

1031

Lastpage

1034

Abstract

We report the design, microfabrication and testing of a flexible 256-electrode array for micro-electrocorticography (μECoG) with an electrode pitch of 500 μm. Our μECoG grid is a flexible five-layer parylene MEMS device (two layers of platinum insulated by three layers of parylene) featuring plasma-etched vias and a monolithically integrated parylene cable which is compression-bonded to a fan-out board using anisotropic conductive film (ACF) technology. We have characterized the device by electrochemical impedance spectroscopy in artificial cerebrospinal fluid (aCSF) and recorded acoustic evoked potentials in vivo from the rat primary auditory cortex.

Keywords

auditory evoked potentials; bioMEMS; bioelectric phenomena; biomedical electrodes; electrochemical impedance spectroscopy; microelectrodes; microfabrication; neurophysiology; μECoG grid; acoustic evoked potentials; anisotropic conductive film; artificial cerebrospinal fluid; electrochemical impedance spectroscopy; electrode pitch; flexible 256-electrode array; large area high density MEMS; microelectrocorticography; microfabrication; monolithically integrated parylene cable; parylene MEMS μECoG array; plasma etching; rat primary auditory cortex; Acoustics; Arrays; Electric potential; Electrodes; Micromechanical devices; Platinum; Resists;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on

Conference_Location

Cancun

ISSN

1084-6999

Print_ISBN

978-1-4244-9632-7

Type

conf

DOI

10.1109/MEMSYS.2011.5734604

Filename

5734604