Title :
Fabrication and testing of a large area, high density, parylene MEMS µECoG array
Author :
Ledochowitsch, P. ; Félus, R.J. ; Gibboni, R.R. ; Miyakawa, A. ; Bao, S. ; Maharbiz, M.M.
Author_Institution :
Univ. of California, Berkeley, CA, USA
Abstract :
We report the design, microfabrication and testing of a flexible 256-electrode array for micro-electrocorticography (μECoG) with an electrode pitch of 500 μm. Our μECoG grid is a flexible five-layer parylene MEMS device (two layers of platinum insulated by three layers of parylene) featuring plasma-etched vias and a monolithically integrated parylene cable which is compression-bonded to a fan-out board using anisotropic conductive film (ACF) technology. We have characterized the device by electrochemical impedance spectroscopy in artificial cerebrospinal fluid (aCSF) and recorded acoustic evoked potentials in vivo from the rat primary auditory cortex.
Keywords :
auditory evoked potentials; bioMEMS; bioelectric phenomena; biomedical electrodes; electrochemical impedance spectroscopy; microelectrodes; microfabrication; neurophysiology; μECoG grid; acoustic evoked potentials; anisotropic conductive film; artificial cerebrospinal fluid; electrochemical impedance spectroscopy; electrode pitch; flexible 256-electrode array; large area high density MEMS; microelectrocorticography; microfabrication; monolithically integrated parylene cable; parylene MEMS μECoG array; plasma etching; rat primary auditory cortex; Acoustics; Arrays; Electric potential; Electrodes; Micromechanical devices; Platinum; Resists;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-9632-7
DOI :
10.1109/MEMSYS.2011.5734604
