DocumentCode
2770534
Title
A single-stage micromachined vacuum pump achieving 164 torr absolute pressure
Author
Zhou, H. ; Li, H.Q. ; Sharma, V. ; Schmidt, M.A.
Author_Institution
Microsyst. Technol. Labs., Massachusetts Inst. of Technol., Cambridge, MA, USA
fYear
2011
fDate
23-27 Jan. 2011
Firstpage
1095
Lastpage
1098
Abstract
We are developing a micromachined vacuum pump for portable analytical instruments that is comprised of a mechanical roughing pump integrated with a micro-machined ion pump. The focus of this paper is on the development of the roughing pump. We have fabricated two generations of micromachined displacement vacuum pumps to explore various design options. Through optimization of design and operation, we can now report a pump that achieves 164 torr absolute pressure, which is to our knowledge the lowest measured pressure in a micromachined vacuum pump operated from atmospheric pressure.
Keywords
ion pumps; micromachining; micropumps; vacuum pumps; atmospheric pressure; displacement vacuum pumps; ion pump; mechanical roughing pump; micromachining; pressure 164 torr; single-stage vacuum pump; Actuators; Fabrication; Micromechanical devices; Micropumps; Pressure measurement; Valves;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location
Cancun
ISSN
1084-6999
Print_ISBN
978-1-4244-9632-7
Type
conf
DOI
10.1109/MEMSYS.2011.5734620
Filename
5734620
Link To Document