Title :
Silicon micromachined ultrasonic micro-cutter
Author :
Lal, Amit ; White, Richard M.
fDate :
Oct. 31 1994-Nov. 3 1994
Abstract :
A silicon micromachined structure capable of producing large ultrasonic displacements (~40 μm) was fabricated. Such a device can be used as a surgical tool. The device uses a longitudinal resonance mode of thin silicon rectangular bars at frequencies in the range of 50 to 150 kHz. Silicon´s acoustical and mechanical properties make it an ideal resonator material for the body of an ultrasonic cutter. Cutting edges sharper than the conventional needles can be produced by the anisotropic etching process. As a proof of concept, a human eye cataractous lens was dissected with a silicon cutter
Keywords :
biomedical equipment; biomedical ultrasonics; eye; micromechanical resonators; radiation therapy; silicon; surgery; 40 mum; 50 to 150 kHz; Si; Si micromachined ultrasonic micro-cutter; acoustical properties; anisotropic etching process; cutting edges; human eye cataractous lens; ideal resonator material; large ultrasonic displacements; longitudinal resonance mode; mechanical properties; surgical tool; thin Si rectangular bars; Biomedical applications of acoustic radiation; Biomedical equipment; Microresonators; Silicon materials/devices; Surgery; Visual system;
Conference_Titel :
Ultrasonics Symposium, 1994. Proceedings., 1994 IEEE
Conference_Location :
Cannes, France
Print_ISBN :
0-7803-2012-3
DOI :
10.1109/ULTSYM.1994.401964
