Development of untethered SU-8 polymer scratch drive microrobots

This paper presents the design, simulation, fabrication and testing of novel, untethered SU-8 polymer microrobots based on scratch drive actuators (SDAs). The design consists of two 100×120×10μm linked SDAs, individually operated close to their resonant frequencies. The resonant frequency and deflection behavior of an individual SDA can be controlled by its shape, thickness, and stiffening design features. As a result, paired SDAs can be actuated individually or simultaneously by a multifrequency driving signal, allowing for two-dimensional displacement. The fabrication process uses SU-8 as structural material and PMGI as sacrificial material. The SU-8 provides a flexible material for the SDA´s plates as well as the bushing. Finally, a Cr/Au layer is blanket deposited to provide electrical conductivity.