DocumentCode
277109
Title
250 Å spacer GaAs/AlGaAs two dimensional electron gas (2DEG) structures with mobilities in excess of 3x106 cm2V-1S-1 at 4 K
Author
Holland, M.C. ; Kean, A.H. ; Stanley, C.R.
Author_Institution
Dept. of Electron. & Electr. Eng., Glasgow Univ., UK
fYear
1992
fDate
33683
Firstpage
42552
Lastpage
42555
Abstract
The authors refine the growth procedures to optimise the mobility in a GaAs/AlGaAs 2DEG. A `standardised´ 250 Å spacer structure has been selected for study to allow growth related effects to be identified. Part of the work has been motivated by the observation that with the Si dopant cell operating at high temperatures (>1325°C) there is a noticeable degradation in the As stale RHEED pattern of GaAs. The Si furnace is the hottest section of the MBE system and may be a substantial source of impurities. The effect of a hot, shuttered Si cell on 10 μm undoped GaAs layers and on 2DEGs has been investigated
Keywords
III-V semiconductors; aluminium compounds; carrier mobility; electron gas; gallium arsenide; molecular beam epitaxial growth; semiconductor growth; 250 angstroms spacer structure; 4 K; GaAs-AlGaAs; MBE; RHEED; carrier mobility; semiconductors; two dimensional electron gas;
fLanguage
English
Publisher
iet
Conference_Titel
III-V Compound Semiconductor Materials Growth, IEE Colloquium on
Conference_Location
London
Type
conf
Filename
168001
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