• DocumentCode
    277109
  • Title

    250 Å spacer GaAs/AlGaAs two dimensional electron gas (2DEG) structures with mobilities in excess of 3x106 cm2V-1S-1 at 4 K

  • Author

    Holland, M.C. ; Kean, A.H. ; Stanley, C.R.

  • Author_Institution
    Dept. of Electron. & Electr. Eng., Glasgow Univ., UK
  • fYear
    1992
  • fDate
    33683
  • Firstpage
    42552
  • Lastpage
    42555
  • Abstract
    The authors refine the growth procedures to optimise the mobility in a GaAs/AlGaAs 2DEG. A `standardised´ 250 Å spacer structure has been selected for study to allow growth related effects to be identified. Part of the work has been motivated by the observation that with the Si dopant cell operating at high temperatures (>1325°C) there is a noticeable degradation in the As stale RHEED pattern of GaAs. The Si furnace is the hottest section of the MBE system and may be a substantial source of impurities. The effect of a hot, shuttered Si cell on 10 μm undoped GaAs layers and on 2DEGs has been investigated
  • Keywords
    III-V semiconductors; aluminium compounds; carrier mobility; electron gas; gallium arsenide; molecular beam epitaxial growth; semiconductor growth; 250 angstroms spacer structure; 4 K; GaAs-AlGaAs; MBE; RHEED; carrier mobility; semiconductors; two dimensional electron gas;
  • fLanguage
    English
  • Publisher
    iet
  • Conference_Titel
    III-V Compound Semiconductor Materials Growth, IEE Colloquium on
  • Conference_Location
    London
  • Type

    conf

  • Filename
    168001