DocumentCode
2771161
Title
Low-power 3-bit piezoelectric MEMS analog to digital converter
Author
Proie, Robert ; Skamp, Jeffrey S Puls ; Polcawich, Ronald G. ; Ivanov, Tony ; Zaghloul, Mona
fYear
2011
fDate
23-27 Jan. 2011
Firstpage
1241
Lastpage
1244
Abstract
This paper reports on a novel MEMS analog to digital converter (ADC) designed within a low-power, piezoelectric MEMS based digital logic process. The 3-bit ADC achieves full operation without the use of additional solid-state circuitry, allowing it to operate with minimal, 3.83 pW, static power dissipation. In addition, two piezoelectric property exploiting operational modes are presented. These increase the total effective number of bits and the system range without increasing the device area.
Keywords
analogue-digital conversion; low-power electronics; micromechanical devices; piezoelectric devices; MEMS analog to digital converter; digital logic process; low-power piezoelectric MEMS; piezoelectric property; power 3.83 pW; solid-state circuitry; static power dissipation; word length 3 bit; Actuators; Analog-digital conversion; Conferences; Micromechanical devices; Power demand; Solid state circuits; Voltage measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location
Cancun
ISSN
1084-6999
Print_ISBN
978-1-4244-9632-7
Type
conf
DOI
10.1109/MEMSYS.2011.5734657
Filename
5734657
Link To Document