Modal analysis and modeling of a frictionless electrostatic rotary stepper micromotor

Author

Stranczl, M. ; Sarajlic, E. ; Krijnen, G.J.M. ; Fujita, H. ; Gijs, M.A.M. ; Yamahata, C.

Author_Institution

Lab. of Microsyst., Ecole Polytech. Fed. de Lausanne (EPFL), Lausanne, Switzerland

fYear

2011

fDate

23-27 Jan. 2011

Firstpage

1257

Lastpage

1260

Abstract

We present the design, modeling and characterization of a 3-phase electrostatic rotary stepper micromotor. The proposed motor is a monolithic device fabricated using silicon-on-insulator (SOI) technology. The rotor is suspended with a frictionless flexural pivot bearing and reaches an unprecedented rotational range of 30° (+/- 15°) at 65 V. We have established a mechanical model of the deformation structure and performed finite element analysis (FEA) simulations of the dynamic properties. These studies are consistent with the extensive experimental characterization performed in the quasi-static, transient, and dynamic regimes.

Keywords

deformation; finite element analysis; machine bearings; micromotors; silicon-on-insulator; stepping motors; deformation structure; finite element analysis; frictionless electrostatic rotary stepper; frictionless flexural pivot bearing; mechanical model; micromotor; modal analysis; monolithic device; silicon-on-insulator technology; Analytical models; Electrostatics; Micromotors; Modal analysis; Rotors; Silicon; Stators;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on

Conference_Location

Cancun

ISSN

1084-6999

Print_ISBN

978-1-4244-9632-7

Type

conf

DOI

10.1109/MEMSYS.2011.5734661

Filename

5734661