Self-engaging and disengaging CMOS-MEMS probes

CMOS-MEMS probes have the ability to interact with external surfaces mechanically and electrically through their conductive tips. Using only the electrothermal actuator of the probe, micro-Newton forces can be applied to make active probe contact with a conductive substrate. Measured cyclic contact resistance has a mean value of 7.4 kΩ and a standard deviation of 11.3 kΩ over 2450 cycles. When the probe actuator is repeatedly turned off, mechanical and electrical contacts are successfully disconnected. Piezoresistive sensors embedded within the probe cantilevers possess a resolution of 44 nm to detect when the tip has come into physical contact with an experimental surface and provide force feedback.