Nanoelectromechanical relays with decoupled electrode and suspension

This paper reports on the modeling, fabrication, and testing of cantilever- and parallel plate-based laterally actuated platinum-coated polysilicon nanoelectromechanical (NEM) relays. The polysilicon acts as the structural layer, while the platinum serves as a conducting contact material, as well as a local routing layer. The two-part cantilever design utilizes a source made of a compliant beam in series with a stiff bridged perimeter electrode to reduce the secondary pull-in of the source to the gate. The parallel-plate-based relay also uses stiffened electrodes in addition to serpentine structures that reduce the actuation voltage. Overdrive gate voltage in excess of 100% without failure and sharp release of the relay from output are achieved for polysilicon relays with 50nm platinum coating and 500nm actuation gap.