Towards automated AFM-based nanomanipulation in a combined nanorobotic AFM/HRSEM/FIB system

In this paper, the semi-automated AFM-based nanomanipulation of silica spheres with a radius of 550 nm is presented. A combined AFM/HRSEM/FIB system is used to facilitate the SEM vision-based pick-and-place handling with haptic feedback. Object recognition and tracking algorithms are described supporting the automated localization of micro-and nanospheres. Automated alignment of source and target sample positions is realized to support fast exchange of different substrates and to speed up the pick-and-place procedure. The integration of a haptic feedback device allows for intuitive AFM-based nanomanipulation with force feedback. The silica spheres are assembled into 2 × 2 μm arrays for applications in infrared spectroscopy.