DocumentCode :
2772384
Title :
Semiconductor Manufacturing Beyond 200mm Wafers
Author :
Rose, Don ; Ranadive, Deepak ; Seidel, Thomas E.
Author_Institution :
Intel
fYear :
1993
fDate :
20-21 Sept. 1993
Keywords :
Biographies; Cost benefit analysis; Implants; Materials handling; Production facilities; Research and development management; Semiconductor device manufacture; Technology management; Thin film devices; Throughput;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Manufacturing, 1993. International Symposium on
Conference_Location :
Austin, TX, USA
Type :
conf
DOI :
10.1109/ISSM.1993.670290
Filename :
670290
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2772384
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