DocumentCode :
2773676
Title :
The Comparison Of Response Surface And Taguchi Methods For Multiple-response Optimization Using Simulation
Author :
Jones, Ken ; Johnson, Mark ; Liou, J.J.
Author_Institution :
Harris Semiconductor Mel~ourne, Florida 32902-0883
fYear :
1992
fDate :
28-30 Sep 1992
Firstpage :
15
Lastpage :
18
Keywords :
Application software; Boron; Design for manufacture; Implants; Manufacturing processes; Optimization methods; Oxidation; Response surface methodology; Robustness; Semiconductor device noise;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronics Manufacturing Technology Symposium, 1992., Thirteenth IEEE/CHMT International
Print_ISBN :
0-7803-0755-0
Type :
conf
DOI :
10.1109/IEMT.1992.639855
Filename :
639855
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2773676
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