Title :
Optimized step controller for a salient-pole micromotor
Author :
Kucukkomurler, A. ; Garverick, S.L.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Case Western Reserve Univ., Cleveland, OH, USA
Abstract :
This paper describes a controller which optimizes the step response of a silicon, micromachined, electrostatic salient-pole micromotor. The control algorithm is based on the determination of two parameters, the critical and final times of the step response, which are obtained from a second-order differential equation of the micromotor model. The parameter values have been determined utilizing both analytical and empirical methods, which yield similar results
Keywords :
electrostatic motors; elemental semiconductors; machine control; optimal control; silicon; step response; MEMS; Si; control algorithm; critical time; differential equation; final time; micromachining; silicon electrostatic salient-pole micromotor; step controller; step response optimization; Analytical models; Capacitance; Electrostatics; Equations; Micromotors; Optimal control; Rotors; Stators; Torque; Voltage;
Conference_Titel :
National Aerospace and Electronics Conference, 2000. NAECON 2000. Proceedings of the IEEE 2000
Conference_Location :
Dayton, OH
Print_ISBN :
0-7803-6262-4
DOI :
10.1109/NAECON.2000.894933
