Title :
2-DOF kinematic XY stage design based on flexure element
Author :
Wang, Weijun ; Han, Changsoo ; Choi, Hyeunseok
Author_Institution :
Sch. of Mechatron. Eng., Hanyang Univ., Ansan, South Korea
Abstract :
This paper presents a planar motion stage design based on flexure element that allow large ranges of motion along x and y direction without causing over-constraint or significant error motions. From comparing the conventional XY stage with the flexure-based compliant XY stage, the main bottleneck for the flexure-based compliant XY stage is parasitic motion because of inherent characteristics of flexure element. Based on the constraint analysis, new mechanism is designed to eliminate the parasitic error, and piezoelectric actuator is used to improve the positioning resolution.
Keywords :
design engineering; motion control; piezoelectric actuators; position control; robot kinematics; constraint analysis; flexure element; flexure-based compliant XY stage; kinematic XY stage design; parasitic motion; piezoelectric actuator; planar motion stage design; positioning resolution; Actuators; Couplings; Fasteners; Force; Kinematics; Materials; Strain; Constraint analysis; Flexure element; Micro-positioning; Piezoelectric actuator; Symmetric parallel constraints;
Conference_Titel :
Mechatronics and Automation (ICMA), 2011 International Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-8113-2
DOI :
10.1109/ICMA.2011.5985783
