2-DOF kinematic XY stage design based on flexure element

Author

Wang, Weijun ; Han, Changsoo ; Choi, Hyeunseok

Author_Institution

Sch. of Mechatron. Eng., Hanyang Univ., Ansan, South Korea

fYear

2011

fDate

7-10 Aug. 2011

Firstpage

1412

Lastpage

1417

Abstract

This paper presents a planar motion stage design based on flexure element that allow large ranges of motion along x and y direction without causing over-constraint or significant error motions. From comparing the conventional XY stage with the flexure-based compliant XY stage, the main bottleneck for the flexure-based compliant XY stage is parasitic motion because of inherent characteristics of flexure element. Based on the constraint analysis, new mechanism is designed to eliminate the parasitic error, and piezoelectric actuator is used to improve the positioning resolution.

Keywords

design engineering; motion control; piezoelectric actuators; position control; robot kinematics; constraint analysis; flexure element; flexure-based compliant XY stage; kinematic XY stage design; parasitic motion; piezoelectric actuator; planar motion stage design; positioning resolution; Actuators; Couplings; Fasteners; Force; Kinematics; Materials; Strain; Constraint analysis; Flexure element; Micro-positioning; Piezoelectric actuator; Symmetric parallel constraints;

fLanguage

English

Publisher

ieee

Conference_Titel

Mechatronics and Automation (ICMA), 2011 International Conference on

Conference_Location

Beijing

ISSN

2152-7431

Print_ISBN

978-1-4244-8113-2

Type

conf

DOI

10.1109/ICMA.2011.5985783

Filename

5985783