مرکز منطقه ای اطلاع رساني علوم و فناوري

DocumentCode :

2774313

Title :

Cost Of Ownership

Author :

Robertson, Frank

Author_Institution :

Sematech

fYear :

1993

fDate :

20-21 Sept. 1993

Keywords :

Costs; Fabrication; Production; Productivity; Rapid thermal processing; Semiconductor device modeling;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Semiconductor Manufacturing, 1993. International Symposium on

Conference_Location :

Austin, TX, USA

Type :

conf

DOI :

10.1109/ISSM.1993.670300

Filename :

670300

Link To Document :