Title :
Optical performance investigation of focused ion beam nanostructured integrated Fabry-Perot microcavities in Al2O3
Author :
Ay, F. ; Bradley, J.D.B. ; Wörhoff, K. ; de Ridder, R.M. ; Pollnau, M.
Author_Institution :
Integrated Opt. Microsyst. (IOMS) Group, Univ. of Twente, Enschede, Netherlands
Abstract :
Focused ion beam (FIB) milling is an emerging technology that enables fast, reliable and well-controlled nanometer-size feature definition. Since the method involves physical removal of material by a beam of ions, the technique can be adapted and optimized almost for any material system.
Keywords :
aluminium compounds; focused ion beam technology; milling; nanopatterning; nanostructured materials; Al2O3; focused ion beam milling; focused ion beam nanostructured integrated Fabry-Perot microcavities; material system; optical performance investigation; well-controlled nanometer-size feature definition; Fabry-Perot; Fluorescence; Frequency; Integrated optics; Ion beams; Laser excitation; Laser transitions; Microcavities; Particle beam optics; Spectroscopy;
Conference_Titel :
Lasers and Electro-Optics 2009 and the European Quantum Electronics Conference. CLEO Europe - EQEC 2009. European Conference on
Conference_Location :
Munich
Print_ISBN :
978-1-4244-4079-5
Electronic_ISBN :
978-1-4244-4080-1
DOI :
10.1109/CLEOE-EQEC.2009.5191501
