• DocumentCode
    2775012
  • Title

    Flexible Intelligent Process Equipment

  • Author

    Lemnios, Zachary J.

  • Author_Institution
    Advanced Research Projects Agency
  • fYear
    1993
  • fDate
    20-21 Sept. 1993
  • Keywords
    Computer aided manufacturing; Computer integrated manufacturing; Costs; DRAM chips; Integrated circuit synthesis; Intelligent sensors; Manufacturing processes; Microelectronics; Production facilities; Random access memory;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Manufacturing, 1993. International Symposium on
  • Conference_Location
    Austin, TX, USA
  • Type

    conf

  • DOI
    10.1109/ISSM.1993.670304
  • Filename
    670304
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2775012