Title :
Flexible Intelligent Process Equipment
Author :
Lemnios, Zachary J.
Author_Institution :
Advanced Research Projects Agency
Keywords :
Computer aided manufacturing; Computer integrated manufacturing; Costs; DRAM chips; Integrated circuit synthesis; Intelligent sensors; Manufacturing processes; Microelectronics; Production facilities; Random access memory;
Conference_Titel :
Semiconductor Manufacturing, 1993. International Symposium on
Conference_Location :
Austin, TX, USA
DOI :
10.1109/ISSM.1993.670304
