• DocumentCode
    2775245
  • Title

    Modeling the threshold voltage of long and short-channel fully depleted SOI MOSFETs with back gate substrate induced surface effects

  • Author

    Imam, Mohamed A. ; Osman, Mohamed A. ; Osman, Ashraf A.

  • Author_Institution
    Motorola Inc., Tempe, AZ, USA
  • Volume
    1
  • fYear
    1997
  • fDate
    14-17 Sep 1997
  • Firstpage
    343
  • Abstract
    A simple analytical threshold voltage models for long and short-channel fully depleted SOI MOSFETs have been derived. The models are based on the analytical solution of the potential distribution in the silicon film (front silicon), which is for the short-channel case is taken as the sum of the long-channel solution to the Poisson´s equation and the short-channel solution to the Laplace equation, and the solution of the Poisson´s equation in the silicon substrate (back silicon). The proposed models accounts for the effects of the back gate substrate induced surface potential (SISP) at the buried oxide-substrate interface. The models predications are in close agreement with PISCES simulation results
  • Keywords
    Laplace equations; MOSFET; semiconductor device models; silicon-on-insulator; Laplace equation; Poisson equation; Si; Si film; analytical threshold voltage models; back gate substrate induced surface effects; buried oxide-substrate interface; fully depleted SOI MOSFET; long-channel devices; potential distribution; short-channel devices; Analytical models; Dielectric constant; MOSFETs; Poisson equations; Semiconductor device modeling; Semiconductor films; Silicon; Substrates; Threshold voltage; USA Councils;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronics, 1997. Proceedings., 1997 21st International Conference on
  • Conference_Location
    Nis
  • Print_ISBN
    0-7803-3664-X
  • Type

    conf

  • DOI
    10.1109/ICMEL.1997.625268
  • Filename
    625268