DocumentCode
2775245
Title
Modeling the threshold voltage of long and short-channel fully depleted SOI MOSFETs with back gate substrate induced surface effects
Author
Imam, Mohamed A. ; Osman, Mohamed A. ; Osman, Ashraf A.
Author_Institution
Motorola Inc., Tempe, AZ, USA
Volume
1
fYear
1997
fDate
14-17 Sep 1997
Firstpage
343
Abstract
A simple analytical threshold voltage models for long and short-channel fully depleted SOI MOSFETs have been derived. The models are based on the analytical solution of the potential distribution in the silicon film (front silicon), which is for the short-channel case is taken as the sum of the long-channel solution to the Poisson´s equation and the short-channel solution to the Laplace equation, and the solution of the Poisson´s equation in the silicon substrate (back silicon). The proposed models accounts for the effects of the back gate substrate induced surface potential (SISP) at the buried oxide-substrate interface. The models predications are in close agreement with PISCES simulation results
Keywords
Laplace equations; MOSFET; semiconductor device models; silicon-on-insulator; Laplace equation; Poisson equation; Si; Si film; analytical threshold voltage models; back gate substrate induced surface effects; buried oxide-substrate interface; fully depleted SOI MOSFET; long-channel devices; potential distribution; short-channel devices; Analytical models; Dielectric constant; MOSFETs; Poisson equations; Semiconductor device modeling; Semiconductor films; Silicon; Substrates; Threshold voltage; USA Councils;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronics, 1997. Proceedings., 1997 21st International Conference on
Conference_Location
Nis
Print_ISBN
0-7803-3664-X
Type
conf
DOI
10.1109/ICMEL.1997.625268
Filename
625268
Link To Document