DocumentCode :
2775245
Title :
Modeling the threshold voltage of long and short-channel fully depleted SOI MOSFETs with back gate substrate induced surface effects
Author :
Imam, Mohamed A. ; Osman, Mohamed A. ; Osman, Ashraf A.
Author_Institution :
Motorola Inc., Tempe, AZ, USA
Volume :
1
fYear :
1997
fDate :
14-17 Sep 1997
Firstpage :
343
Abstract :
A simple analytical threshold voltage models for long and short-channel fully depleted SOI MOSFETs have been derived. The models are based on the analytical solution of the potential distribution in the silicon film (front silicon), which is for the short-channel case is taken as the sum of the long-channel solution to the Poisson´s equation and the short-channel solution to the Laplace equation, and the solution of the Poisson´s equation in the silicon substrate (back silicon). The proposed models accounts for the effects of the back gate substrate induced surface potential (SISP) at the buried oxide-substrate interface. The models predications are in close agreement with PISCES simulation results
Keywords :
Laplace equations; MOSFET; semiconductor device models; silicon-on-insulator; Laplace equation; Poisson equation; Si; Si film; analytical threshold voltage models; back gate substrate induced surface effects; buried oxide-substrate interface; fully depleted SOI MOSFET; long-channel devices; potential distribution; short-channel devices; Analytical models; Dielectric constant; MOSFETs; Poisson equations; Semiconductor device modeling; Semiconductor films; Silicon; Substrates; Threshold voltage; USA Councils;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microelectronics, 1997. Proceedings., 1997 21st International Conference on
Conference_Location :
Nis
Print_ISBN :
0-7803-3664-X
Type :
conf
DOI :
10.1109/ICMEL.1997.625268
Filename :
625268
Link To Document :
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