DocumentCode :
2775657
Title :
Adaptable Manufacturing Systems
Author :
Wood, Samuel C. ; Saraswat, Krishna C.
Author_Institution :
Stanford University
fYear :
1993
fDate :
20-21 Sept. 1993
Keywords :
Application specific integrated circuits; Cost function; Manufacturing systems; Parallel processing; Process control; Profitability; Pulp manufacturing; Semiconductor device manufacture; Semiconductor device modeling; Throughput;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Manufacturing, 1993. International Symposium on
Conference_Location :
Austin, TX, USA
Type :
conf
DOI :
10.1109/ISSM.1993.670307
Filename :
670307
Link To Document :
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