Title :
Adaptable Manufacturing Systems
Author :
Wood, Samuel C. ; Saraswat, Krishna C.
Author_Institution :
Stanford University
Keywords :
Application specific integrated circuits; Cost function; Manufacturing systems; Parallel processing; Process control; Profitability; Pulp manufacturing; Semiconductor device manufacture; Semiconductor device modeling; Throughput;
Conference_Titel :
Semiconductor Manufacturing, 1993. International Symposium on
Conference_Location :
Austin, TX, USA
DOI :
10.1109/ISSM.1993.670307