DocumentCode
2775657
Title
Adaptable Manufacturing Systems
Author
Wood, Samuel C. ; Saraswat, Krishna C.
Author_Institution
Stanford University
fYear
1993
fDate
20-21 Sept. 1993
Keywords
Application specific integrated circuits; Cost function; Manufacturing systems; Parallel processing; Process control; Profitability; Pulp manufacturing; Semiconductor device manufacture; Semiconductor device modeling; Throughput;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing, 1993. International Symposium on
Conference_Location
Austin, TX, USA
Type
conf
DOI
10.1109/ISSM.1993.670307
Filename
670307
Link To Document