DocumentCode

2776318

Title

The Competitive Semiconductor Manufacturing Survey

Author

Leachman, Robert C.

Author_Institution

University of California at Berkeley

fYear

1993

fDate

20-21 Sept. 1993

Keywords

Best practices; Educational institutions; Fabrication; Lead compounds; Production facilities; Semiconductor device manufacture;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing, 1993. International Symposium on

Conference_Location

Austin, TX, USA

Type

conf

DOI

10.1109/ISSM.1993.670310

Filename

670310