DocumentCode :
2777199
Title :
Development of Quality Control System for Semiconductor Wafer Fabrication Line
Author :
Ishikawa, Seiji ; Shimayashiro, Sadao ; Miyazaki, Isao ; Sato, Osamu
Author_Institution :
Hitachi, Ltd.
fYear :
1993
fDate :
20-21 Sept. 1993
Keywords :
Costs; Fabrication; Failure analysis; Investments; Manufacturing; Mass production; Performance analysis; Production systems; Quality control; Semiconductor device manufacture;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Manufacturing, 1993. International Symposium on
Conference_Location :
Austin, TX, USA
Type :
conf
DOI :
10.1109/ISSM.1993.670314
Filename :
670314
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2777199
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