مرکز منطقه ای اطلاع رساني علوم و فناوري - Identifying The Source Of Dust Produced During LSI Fabrication

DocumentCode :

2777227

Title :

Identifying The Source Of Dust Produced During LSI Fabrication

Author :

Takeuchi, Hideaki

Author_Institution :

NTT LSI Laboratories

fYear :

1992

fDate :

28-30 Sep 1992

Firstpage :

116

Lastpage :

118

Keywords :

Character generation; Fabrication; Instruments; Laboratories; Large scale integration; Layout; Monitoring; Production; Shape; Weibull distribution;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Electronics Manufacturing Technology Symposium, 1992., Thirteenth IEEE/CHMT International

Print_ISBN :

0-7803-0755-0

Type :

conf

DOI :

10.1109/IEMT.1992.639873

Filename :

639873

Link To Document :