DocumentCode

2777227

Title

Identifying The Source Of Dust Produced During LSI Fabrication

Author

Takeuchi, Hideaki

Author_Institution

NTT LSI Laboratories

fYear

1992

fDate

28-30 Sep 1992

Firstpage

116

Lastpage

118

Keywords

Character generation; Fabrication; Instruments; Laboratories; Large scale integration; Layout; Monitoring; Production; Shape; Weibull distribution;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronics Manufacturing Technology Symposium, 1992., Thirteenth IEEE/CHMT International

Print_ISBN

0-7803-0755-0

Type

conf

DOI

10.1109/IEMT.1992.639873

Filename

639873