Multilayer nanogranular thin films as the materials for magnetic microinductors

Author

Urse, M. ; Chiriac, H. ; Grigoras, M. ; Tibu, M.

Author_Institution

National Inst. of R&D for Tech. Phys., Iasi, Romania

Volume

1

fYear

2005

fDate

3-5 Oct. 2005

Firstpage

89

Abstract

Some results concerning the magnetic, electrical and microstructural properties of multilayer [FeCoBN/Si₃N₄]xn films in view of their utilization for manufacturing thin film magnetic microinductors, are presented. A comparison between the physical properties of FeCoBN and [FeCoBN/Si₃N₄]xn films is also reported The [FeCoBN/Si₃N₄]xn thin films with the thickness of the FeCoBN layers varied from 10 to 30 nm, exhibit good soft magnetic characteristics and high values for electrical resistivity such as Ms of 172 - 185 emu/g, Hc of 4 - 18 Oe and ρ of 820 - 480 μΩ-cm, respectively. These physical properties of the samples are discussed in relation with the microstructure of the multilayer system.

Keywords

boron alloys; cobalt alloys; coercive force; electrical resistivity; inductors; iron alloys; magnetic multilayers; magnetic thin films; nanostructured materials; silicon compounds; soft magnetic materials; 10 to 30 nm; FeCoBN-Si₃N₄; electrical properties; electrical resistivity; magnetic microinductor; magnetic properties; microstructural properties; multilayer; nanogranular thin film; physical properties; soft magnetic characteristics; Electric resistance; Magnetic films; Magnetic materials; Magnetic multilayers; Magnetic properties; Manufacturing; Micromagnetics; Semiconductor films; Semiconductor thin films; Soft magnetic materials;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference, 2005. CAS 2005 Proceedings. 2005 International

Print_ISBN

0-7803-9214-0

Type

conf

DOI

10.1109/SMICND.2005.1558717

Filename

1558717