مرکز منطقه ای اطلاع رساني علوم و فناوري

DocumentCode :

2777533

Title :

Total Productive Maintenance

Author :

Blanc, Andre

Author_Institution :

Harris Semiconductor

fYear :

1993

fDate :

20-21 Sept. 1993

Keywords :

Acceleration; Production facilities; Semiconductor device manufacture;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Semiconductor Manufacturing, 1993. International Symposium on

Conference_Location :

Austin, TX, USA

Type :

conf

DOI :

10.1109/ISSM.1993.670316

Filename :

670316

Link To Document :