Title :
Analytical vs. computational approach of the pull-in voltage of electrostatically actuated micro-bridges
Author :
Tibeica, C. ; Voicu, R. ; Bazu, M. ; Ilian, V.E. ; Vasilache, D. ; Galateanu, L. ; Pons, P. ; Yacine, K. ; Flourens, F.
Author_Institution :
National Inst. for R&D in Microtechnologies, Bucharest, Romania
Abstract :
Analytical and computational approaches for modeling the electrostatically actuated micro-bridges were compared using the pull-in voltage as behavioral parameter. Sets of FEM-based simulations were performed in order to find out the optimum model applicable for bridge structures and simulation settings needed for converging to the experimental measurements.
Keywords :
electrostatic actuators; finite element analysis; superconducting microbridges; FEM-based simulations; behavioral parameter; bridge structures; electrostatically actuated microbridges; pull-in voltage; Analytical models; Bridge circuits; Computational modeling; Electrostatic actuators; Electrostatic analysis; Material properties; Microelectromechanical devices; Predictive models; Residual stresses; Voltage;
Conference_Titel :
Semiconductor Conference, 2005. CAS 2005 Proceedings. 2005 International
Print_ISBN :
0-7803-9214-0
DOI :
10.1109/SMICND.2005.1558741
