• DocumentCode
    2778029
  • Title

    Integration of CNT with TIA into gas sensors

  • Author

    Huang, Jung-Tang ; Yang, Yao-Yi ; Lu, Shey-Shi ; Tsai, Cheng-Hung ; Lin, Liang-Tse ; Yang, Chiu-Chin

  • Author_Institution
    Nat. Taipei Univ. of Technol., Taipei
  • fYear
    2006
  • fDate
    11-14 Dec. 2006
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    This paper explores the use of single-walled carbon nanotubes (SWCNTs) as a gas sensor for detecting organic gas molecules. A low-temperature dielectrophoresis (DEP) method is employed to combine CNTs with Transimpedance Amplifier (TIA) based on UMC 0.18 um 1P6M CMOS process into a nanosensor device.
  • Keywords
    amplifiers; carbon nanotubes; electrophoresis; gas sensors; nanotube devices; C; CMOS process; gas sensor; low-temperature dielectrophoresis; nanosensor device; organic gas molecules; single-walled carbon nanotubes; transimpedance amplifier; Atomic force microscopy; Biosensors; Carbon nanotubes; Circuits; Dielectrophoresis; Electrodes; Fabrication; Gas detectors; Nanoscale devices; Temperature sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic Materials and Packaging, 2006. EMAP 2006. International Conference on
  • Conference_Location
    Kowloon
  • Print_ISBN
    978-1-4244-0834-4
  • Electronic_ISBN
    978-1-4244-0834-4
  • Type

    conf

  • DOI
    10.1109/EMAP.2006.4430660
  • Filename
    4430660