Development and characterizations of low cost accelerometers

Accelerometers developed originally for uses in military, navigation and automotive applications but are finding applications in pointing devices and game pads. The proliferation of accelerometers in consumer products depends on the availability of low cost accelerometers. In this investigation, consumer-based non-silicon accelerometers are designed and fabricated for sensing human motions and gestures. A capacitive motion sensor was designed and fabricated using organic substrate technologies. The prototypes are designed to have a dynamic range of plusmn5g and a bandwidth from 0 to 20 Hz, which covers the range of accelerations for human limbs. The performance of the prototype was benchmarked against existing accelerometers. Since the organic materials are less robust compared to silicon, the thermal behaviors of the prototype sensors were analyzed using FEM and experimentally characterized. The results showed that the prototypes´ sensing capabilities and stabilities are suitable for use in consumer applications.