DocumentCode :
2778183
Title :
Silicon Micro-mechanics For Solid State Sensors
Author :
Haviland, Jeffrey S.
Author_Institution :
Honeywell, Inc.
fYear :
1992
fDate :
28-30 Sep 1992
Firstpage :
138
Lastpage :
144
Keywords :
Chemical sensors; Hall effect; Integrated circuit packaging; Intelligent sensors; Magnetic field measurement; Magnetic sensors; Mechanical sensors; Optical sensors; Silicon; Solid state circuits;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronics Manufacturing Technology Symposium, 1992., Thirteenth IEEE/CHMT International
Print_ISBN :
0-7803-0755-0
Type :
conf
DOI :
10.1109/IEMT.1992.639878
Filename :
639878
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2778183
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