DocumentCode
2778922
Title
Fabrication of micro-channels and waveguides by fs-laser direct writing in glasses
Author
Gottmann, Jens ; Esser, Dagmar ; Hörstmann-Jungemann, Maren
Author_Institution
Lehrstuhl fur Lasertech. (LLT), RWTH Aachen Univ., Aachen, Germany
fYear
2009
fDate
14-19 June 2009
Firstpage
1
Lastpage
1
Abstract
Micro-channels in fused silica and waveguides in laser active glass materials are fabricated with fs-laser pulses. The use of a high repetition rate laser and a fast scanning system potentially allow the fabrication of laser sources and micro-mechanical components with high speed.
Keywords
high-speed optical techniques; laser materials processing; micro-optomechanical devices; microfabrication; optical glass; optical waveguides; silicon compounds; fast scanning system; high-speed optical technique; laser direct writing; microchannel fabrication; micromechanical components; optical glasses; optical waveguides; Etching; Glass; Optical device fabrication; Optical materials; Optical pulses; Optical waveguides; Refractive index; Silicon compounds; Waveguide lasers; Writing;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics 2009 and the European Quantum Electronics Conference. CLEO Europe - EQEC 2009. European Conference on
Conference_Location
Munich
Print_ISBN
978-1-4244-4079-5
Electronic_ISBN
978-1-4244-4080-1
Type
conf
DOI
10.1109/CLEOE-EQEC.2009.5191724
Filename
5191724
Link To Document